Sanyu Co.,Ltd

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Products

Specifications

Model MPE-510
Dimensions System dimensions:1200 mm (W) ×800 mm (D) ×1800 mm (H)
Weight:Approx.300kg
Chamber dimensions:420 mm (W) ×510 mm (D) ×386.5 mm (H)
Stage
5axes(X, Y, Z, θx, θy)
Stage Travel:X=40 mm, Y=130 mm, Z=10 mm θx, θy=±1°
Stage Resolution:X, Y, Z≦5μm θx, θy≦0.1°
Sample Size Package:14 mm, 20 mm, 24 mm
Chip:6.5 mm, 10 mm, 15 mm
Process gases CF4 (0.1 MPa) , N2 (0.2 MPa) , D.A (0.5 MPa)
Vacuum pump Scroll pump (250 L)
Plasma gun RF power 50 W
Capillary diameter :0.5 mm - 4 mm
Capillary material : alumina
Target materials Si, SiO2, W, Ti, Ta, PIQ, SiN

Applications

1.Local deprocessing of LSI’s
2.Preprocessing for FIB milling
3.Other local plasma processing Local

Examples

Local delaying of a PIQ passivation layer
Local delaying of a PIQ passivation layer

LSI deprocessing
LSI deprocessing