Dimensions 64 mm × 55 mm × 62 mm (W.D.H) Weight Approx. 550 g Coarse adjustment ◎Travels
15 mm (XY), 10 mm (Z)
10 nm (closed-loop operation)
>500 nm (open-loop operation)
Fine adjustment ◎Travels
1 μm (XYZ)
< 1 nm
＜NMS110LE＞ Configuration NMS(one unit or more ),
Control box(one se), Control PC
Characteristic Owing to the closed loop control using a linear encoder in each axis of motion, coarse positioning with a resolution better than
10 nm is possible in the full range of travel for every axis.
＜NMS110S＞ Configuration NMS(one unit), Control box(one set) Characteristic A simple and low-cost configuration without linear encoders. XYZ axes of motion can be controlled by single control box. Nanospace operation becomes possible at relatively low cost.
- SPPA possesses
- Our original actuator, SPPA (Super Precision Piezo Actuator), seamlessly combines coarse and fine positioning using a single piezoelectric transducer.
- System configurations
・Characterization of electric properties
・Removing surface contaminants
・It offers various applications by
installing multiple units into the SEM
・It is applicable to a number of fine
manipulation under atmospheric
conditions in combination
with an optical microscope